Modeling and Characterization of the Sensitivity of a Hot-wire Particle Velocity Sensor
نویسندگان
چکیده
The sensitivity of an innovative micromachined acoustic sensor consisting of four hot-wires is analyzed theoretically and experimentally. An analytical model is presented that describes both the air flow and the temperature profile in and around the probe. The presence of the chip surface in the vicinity of the wires influences the acoustic flow, while also affecting the temperature distribution in the probe. Both effects result into a specific angular dependence of the sensor sensitivity. Acoustic flow measurements are compared with the theory and with numerical simulations on the device,showing good qualitative and quantitative correspondence.
منابع مشابه
Four-wire orthogonal structure for accurate measurement of fluid velocity and wind flow direction using silicon micro-machining on silicon nitride membranes
Microelectromechanical thermal sensors are one of the most accurate and important tools for measuring the direction and velocity of an acoustic wave and winds. Detection of wind direction and speed in different ranges has different applications such as meteorology, wind power plants, gas flow measurement in smart building and gas consumption of power plants. In this paper, a four wires sensor i...
متن کاملDirectional Sensitivity of a Three Dimensional Particle Velocity Sensor
⎯ The omni-directional sensitivity pattern of an integrated three dimensional acoustic sensor, composed of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. We investigate the influence of the presence of the probe surface on the direction of the measured particle velocity measured by the sensors, and a description of the gas flow profile around the integrate...
متن کاملAn integrated 3D sound intensity sensor using four-wire particle velocity sensors: II
The sensitivity of a micromachined acoustic sensor consisting of four hot-wire particle velocity sensors is analysed theoretically and experimentally. The device and its fabrication have been presented in part 1 of this paper (Yntema et al 2010 J. Micromech. Microeng. 20 015042). A relatively straightforward analytical model is presented that describes both the air flow around the probe and the...
متن کاملModeling of capacitance and sensitivity of a MEMS pressure sensor
In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM). It can b...
متن کاملAn integrated 3D sound intensity sensor using four-wire particle velocity sensors: I
Complete characterization of a sound field requires measurement of both sound pressure and particle velocity. In this paper, a new symmetrical four-wire sensor configuration is discussed which has a lower noise floor than its two-wire version and measures in two dimensions. With a pair of four-wire sensors, a fully integrated 3D particle velocity sensor is realized with smaller size than its pr...
متن کامل